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Company Established In
1996

COMPANY INFORMATION

EMPLOYEES
1-50

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Aurion Anlagentechnik GmbH: Plasma and Radio Frequency Technology (Systems – Components – Services)

Aurion delivers systems for the treatment of and the coating on surfaces by use of plasma processes as well as components for radio frequency technology.

Plasma technologies employed include:

- Cleaning and activation by RIE (Reaktive Ion Etching) and Microwave

- Coating by PVD (Physical Vapour Deposition, Sputtering) and PECVD (Plasma Enhanced Chemical Vapour Deposition)

- Activation by atmospheric plasma

Furthermore the team at Aurion offers its strong expertise in the area of plasma and radio frequency technology for consulting services and training.

Apart from a range of standard systems for surface technology Aurion designs and builds custom made systems which are tailored to the customer s requirements.

Aurion s systems are used in the following industry segments:
Semiconductors, Medical, Optics, Automotive