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Our Products:
Fil-Tech is a worldwide supplier and manufacturer of thin film monitoring supplies. We manufacture 6MHz and 5MHz Quality Crystals coated in Gold, Stress Relieving Alloy, Silver, and Advanced Adhesion Alloy. Try our NEW Extreme Temperature Crystals in Gold or Stress Relieving Alloy that are stable in the 200C range for processes utilizing excessive heat in vacuum, including VD, OVPD and ALD. We have a line of Liquid Plating 1" and .550" Crystals coated in Au, Stress Relieving Alloy, Pt, Cu, SiO2, Stainless Steel, Al, Al2O3 and other custom materials for measurement in liquid or gas environments.

Fil-Tech manufactures single and dual sensor heads with shutters, bakeable sensor heads, single and dual feedthroughs on 1" bolts and 2 3/4" flanges, sputter and sensor heads with built in oscillators, and custom hardware. Our NEW QI6100 Quartz Crystal 6 Changer hold 6 crystals to rotate a new crystal into position for uninterrupted deposition monitoring and is offered at $13,500. We have 2" magnetron sputter sources in stainless steel with a larger water cooling pocket.

We supply SQM-220 and SQM-160 rate/thickness monitors, emitter assemblies and parts for Temescal and Telemark electron beam guns, crucible liners in Graphite, Fabmate, Mo, W, VC, BN, Cu, Al2O3 and other materials, and crucibles and covers in OFHC. We offer ion source replacement parts for Veeco Commonwealth Mark I and II and Ion Tech, FT704 and FT705 diffusion pump fluids, Chemours Krytox 1500 fluids and 240, EG, and GPL greases, hydrocarbon oils, Santovac 5, Alcatel style leak detector filaments, and ionization, convection and thermocouple gauges and controllers.

Call us at 617-227-1133 or email for stock supplies and savings, we are glad to help.

Our History:
Fil-Tech is a family owned and operated business established in 1969. After working for years in direct sales in the semiconductor industry, Paul Becker started Fil-Tech after recognizing the need for stock delivery of quality aftermarket consumables - at prices competitive to the OEM's. Paul began stocking and selling competitively priced quality leak detector filaments and vacuum ionization and thermocouple gauge tubes to the semiconductor industry. In the late 1970's during a severe and extended shortage of DC704 and DC705, Fil-Tech added the import and sale of FT704 and FT705, generic equivalents to Dow Corning fluids. Soon after, Fil-Tech began selling replacement parts for electron beam and ion sources guns and hydrocarbon fluids for mechanical pumps. Fil-Tech was now concentrating on consumables in the thin film deposition industries as well as the semiconductor industry.

In the late 1980's, Paula L. Becker joined Fil-Tech. At the same time, Fil-Tech became an authorized distributor for DuPont/Chemours for their line of PFPE Krytox fluids and greases. Fil-Tech also began distributing monitoring quartz crystal for a manufacturing start up company, Cold Springs R&D, Inc. In the years that followed, Fil-Tech became the principal customer of Cold Springs and in January, 2004, Paul, Diana, and Paula purchased Cold Springs form its founder. Fil-Tech now owns and operates Cold Springs which manufactures Quality Crystals in all styles of 6MHz , 5MHz, and 4.4 MHz quartz, liquid plating crystals, sensor heads and feedthroughs, custom hardware in stainless and copper, and monitor instrumentation.

Today, Fil-Tech and Cold Springs supply worldwide and concentrate on Quality, Savings, and Stock Delivery on replacement parts. Please call us for cross reference information, pricing or technical support. We will always personally answer your call, we are glad to help!

Original Equipment Manufacturer (OEM):
Inficon Maxtek Agilent Technologies (Varian) Axcelis (Eaton) Agilent Technologies (Varian) Alcatel Ametek/DuPont CEC Anelva Apiezon Applied Materials (AMAT) Axcelis (Eaton) Balzers Umicore Unaxis Sloan SRS Q-Sense MKS Brooks (Granville) CTI Cryogenics Dalton Dow Corning DuPont Fil-Tech Filterdyne Genus Hastings Hilco Intellemetrics Kinney Lam Research JEOL Leybold Maxtek/Inficon MDC MKS (HPS) MRC Novellus Perkin Elmer Phelps Q-Sense Satisloh (Satis) Sigma/Inficon Sloan Stanford Research Systems Stokes Telemark (CHA) Temescal (Ferrotec) Thermionics Ulvac Veeco (Commonwealth Mark I, I+,II, II+ or III) Veeco (CVC) Veeco (Ion Tech) Veeco (Kronos) VSEA (Varian Semiconductor Equipment) Welch Chemours Thermionics Novellus SEN Hasings CVC MRC Fabmate Instrutech

Product Category:
Quartz Crystals Sensors Quartz Crystals Liquid Crystals Electron Beam Gun, Emitter Assembly Chrome Plated Tungsten Rods Convection Gauges and Modules Deposition Materials, SiO2 Electron Beam Gun, Crucible Liners Electron Beam Gun, Crucibles and Covers Electron Beam Gun, Emitter Assembly Electron Beam Gun, Filaments Electron Beam Gun, High Performance Emitter Electron Beam Gun, Insulators Electron Beam Gun, MDC Filters, Oil Fluids, Diffusion Pump 702, 704, 705 Fluids, Diffusion Pump Reprocessing Fluids, Mechanical Pump Fluids, Octoil and Convoil Fluids, Santovac 5 Greases and Lubrication Heaters, Diffusion Pump, Dalton Helium Leaks, Calibrated Ion Source, Ion Tech/Veeco Ion Source, Mark I Veeco/Commonwealth Ion Source, Mark I+ Veeco/Commonwealth Ion Source, Mark II Veeco/Commonwealth Ion Source, Mark II+ Veeco/Commonwealth Ion Source, Mark III Veeco/Commonwealth Ion Source, Satis Ion Source Parts Ionization Gauge Nude Filaments Ionization Gauge Tubes Ionization Gauge Tubes, UHV, Nude Krytox Krytox, Greases Krytox, Remanufacturing Leak Detectors, Filaments Leak Detectors, Replacement Parts Quartz Crystals Liquid Crystals Quartz Crystals Sensors Quartz Crystals, Hardware Rate Thickness Monitors Quartz Crystals SEM Service Thermocouple Gauge Tubes Piezoelectric Crystals Chemours LVP Electronic Grade Greases GPL Oils and Greases