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Vacuum Pumps, Chillers, and Abatement Products & Services

Trillium US Inc., established in 2002, has service and manufacturing locations in Hamburg, NJ, Austin, TX, and Clackamas, OR. In addition, Trillium has local engineers based in Salt Lake City, UT, Minneapolis, MN, Colorado Springs, CO, Burlington, VT, and Middletown, NY.

Trillium specializes in vacuum pump repair, new and refurbished pumps and spare parts. Trillium’s vacuum capabilities include dry, rotary piston, blower, rotary vane, cryo and turbo pumps, and Trillium operates 3 service centers in the USA. Trillium provides new CryoPlex cryo-pumps, M series helium compressors as well as Univac Rotary Piston pumps and mechanical blowers. We offer a wide range of refurbished pumps as well including Edwards, Leybold, CTI, Ebara and many more. Trillium also supplies temperature control unit (TCU) repair service as well as new and refurbished chillers and heat exchangers. In addition, Trillium is the largest US supplier of refurbished exhaust gas abatement systems (point of use scrubbers), and one of the largest acquirers of excess vacuum, TCU and abatement equipment.

In support of our repaired and refurbished products, Trillium provides on-site service including turn-key equipment maintenance for pumps, TCUs, and abatement equipment.

With an international commercial, educational, R&D and Government customer base, Trillium provides service and product supporting industries such as Semiconductor, LED, Solar, MEMS, Nanotechnology, Medical, and many more.

Trillium's management systems are registered to the ISO:9001 standard and employs approximately 125 personnel in the USA.